Contactless Handling of Wafers in the Semiconductor Industry
Electronics, Free Full-Text
Wafer Handling Applications: edge-gripper, aligner, mapping sensor, thin wafer wand.
Wafer Handling Components - HighQ Components
Semiconductor Wafer Handling Systems
Illustration: (a) side-view of gripper contact point away from 2mm edge
Wafer Handling Applications: edge-gripper, aligner, mapping sensor, thin wafer wand.
Decoding the Technology Behind Wafer Handling Robots - Karkhana
Wafer Gripper, 100 to 450 mm - Fabmatics
3-point mechanical wafer gripper 6 (150 mm) PTFE
Wafer Handling Components - HighQ Components
Products SAL2081 (Edge-grip type)